MEMS原位集成传感器振动冲击试验研究
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U467.1; TH113.1; TH824.4

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Vibration and Shock Testing for Embedded MEMS Sensor for Intelligent Aero-engine Applications
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    摘要:

    智能航空发动机及其他机械系统的智能化需要抗高振动和大冲力的原位集成传感器,要满足高温、高振动、高冲击的苛刻工作环境。为此制作了发动机涡轮叶片原位集成高温温度传感器,并且进行了一系列的高温试验和振动冲击试验。该原位集成传感器利用微机电系统(micro-electro-mechanical-system, 简称MEMS)制造技术制作在涡轮叶片表面,不仅可以原位测量高达800℃的环境温度,并且具有很高的机械强度,可以承受高达40g的振动和100g的冲力。

    Abstract:

    Intelligent aero-engines and other mechanical systems require the vibration-and shocking-resistant embedded sensors, which also has to endure the tough requirements such as high temperature, high shocking, and high vibration strength.In this paper,a high temperature embedded sensor by the aid of micro-electro-mechanical-system (MEMS) technology is integrated into the aero-engine turbine blade. High temperature characterization and a series of vibrational and shocking tests are conducted to verify the functionality of the sensor system in order to stand for the tough working environment of the sensor system including the attaching-ability of MEMS thin film as well as the joint strength of the connection cables to the sensor. The sensor system is capable of sensing up to 800℃ high temperature and stand for up to 40g vibration and 100g shocking.

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  • 在线发布日期: 2018-07-04
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