面向智能高速机床的高频响加速度计研究
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    摘要:

    针对智能高速机床对高频响、微振动检测的需要,提出并研制了一种基于双桥梁结构的高频 响微加速度传感器。利用Ansys静态与模态仿真,分析了双桥梁结构的应力状态和固有频率, 一阶固有频率为118 kHz,达到了预定的设计要求。结合MEMS湿法刻蚀工艺与硅玻璃键和 技术得到传感器样品。静态实验结果表明,双桥梁结构加速度传感器在3V的稳压电源下主轴 灵敏度达到了0264 mV/g,非线性度为067%,迟滞为269%。 动态标定系统测试表明, 传感器动态响应频率达到1246 kHz,满足智能机床主轴在转速达到60 kr/min时的高频响 测量要求。

    Abstract:

    A high response frequency accelerometer based on double-bridge beam structure was developed and fabricated to meet the needs of high response frequency vibration detection of intelligent high speed machine tools. Using static and modal analysis through Ansys, the stress and natural frequency of double bridge beam were analysed, and the first order natural frequency was 11.8 kHz, meeting the design requirement. An accelerometer sample was obtained by using wetting etching process and anodic bonding. The experimental results show the prime sensitivity of the developed accelerometer is up to 0.264mV/g with 3V DC power supply, with a nonlinearity of 0.67% and a hysteresis of 2.69%. Dynamic calibration experiment shows that the response frequency of the accelerometer is 12.46 kHz, meeting the need of high frequency measurement when the machine tool spindle rotates at the speed of 60kr/min.

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  • 在线发布日期: 2013-06-08
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