Abstract:In order to find the effect of valve′s structure and material parameters on a single conical shell valve piezoelectric pump, a structural design method is explored to adjust the pump′s output. Firstly, the valve′s stress distribution has been analyzed, and its kinematics model has been set up. Based on these, the relationship between the valve′s bending deformation and parameters, such as stiffness, quality, etc., is obtained. Then the relation ship between the working frequency and these parameters are also qualitatively analyzed. Finally, the pump prototype is manufactured, and its experimental results prove the corresponding theoretical analysis. In the experiments, when a reasonable parameter has been chosen, the flow rate can reach 190 ml/min when the working frequency is 56 Hz and the voltage is 220 V.