Abstract:In order to solve the problem that the existing tower-type ultrasonic motors(USMs) cannot control the stator′s normal vibration or tangential vibration separately, a mode-control-decoupling linear ultrasonic motor(LUSM) with a tower-type stator is presented. The LUSM is designed to have two non-coplanar, orthogonal working modes: one is the symmetric vibration mode in the x-z plane that independently excites the driving tip′s normal vibration, while the other is the bending vibration mode in the y-z plane that independently excites the driving tip′s tangential vibration. Further, the scheme of piezoelectric ceramics (PZTs) polarization and arrangement location is correspondingly designed as follows: The PZTs are divided into two phases, A and B, in which phase A is used to excite the symmetric vibration mode in the x-z plane, and phase B is used to excite the bending vibration mode in the y-z plane. So the two working modes can be controlled in a decoupling way by controlling the phases separately. The experimental results show that under the mode-control-decoupling condition, when the driving voltage of phase A is equal to 400Vp-p and the driving voltage of phase B is varied between 0 and 400Vp-p , the motor offers a maximum velocity of 420mm/s and a minimum velocity of 23mm/s.