Abstract:Ultrasonic nanomanipulation is an emerging technology that merges ultrasonics, nanotechnology and electrical driving technology. It has great potential applications in numerous areas, such as the assembly, measurement and fabrication of nanostructures and systems, the handling of biological samples, the manufacturing of microelectronic/photonic devices, and the synthesis of newmaterial. This paper introduces the principles, functions, device structures and characteristics, and potential applications of the ultrasonic nanomanipulation technology, based on the work done by the authors′research team in the last three years. The manipulation functions include nano trapping and transfer, nano rotary driving, and nano concentration.