Abstract:In modern precision manufacturing industry such as semiconductor fabrication and optical waveguide packaging, the requirements of the long traveling stroke and high resolution, which are hard to achieve simultaneously with a traditional actuator, become urgent. To develop such an actuator, this project aims at developing novel linear stepping motor using stacked piezoelectric actuators. The operation principle of this linear piezoelectric motor is analyzed, which shows that its thrust increases with preload and that it is capable of large thrust and holding force with the power off. Based on analysis of this principle, a proof of concept prototype is fabricated, and specific requirements of assembly are discussed. The principle is validated through testing. By applying a voltage signal of peak to peak value 100 V with 50 V offset and a frequency of 10 Hz, the prototype′s speed reaches 63.3 μm/s, with a difference of 6.9% to that of the analytical results.