Abstract:A cone-shaped MDOF-USM (multi-degree-of-freedom ultrasonic motor) is designed for research and application. The single-foot drive mode is adopted on the stator. A four-quadrant piezoelectric stack is employed as the exciting element to generate two-dimensional linear motion, and its movement mechanism is analyzed. The parametric model of the MDOF-USM is set up in ANSYS, and the finite element model is imported into the Optimus (a multi-disciplinary optimization software). Optimization results indicate that the design requirements of the MDOF-USM are fulfilled. Finally, a MDOF-USM is successfully manufactured and applied to an x-y platform.