The traveling wave type ultrasonic motor has a high-pressure and high-frequency drive signal. The power and efficiency are difficult to detect at all levels of the system, which affects subsequent study of the performance of the traveling wave and hollow type ultrasonic motor. First, the ultrasonic motor drive signal is processed using the Fourier transform method. Then, the calculation method of all efficiency levels of the motor and drive system is established, and the power and efficiency are detected. Further, the effects of the driving frequency, driving voltage and resonance matching points on the system′s efficiency are studied. Experiments show that the closer the resonance frequency of the driving frequency and the larger the drive voltage, the higher the overall efficiency of the system. Experiments ensured that the resonance point of the driver circuit was much higher than the mechanical resonant frequency, so that the drive signal frequency lay between the circuit resonance frequency and the mechanical resonant frequency. In this case, the efficiency of the system was highest.