Abstract:This paper presents a microflow stabilizer, which contains a fluid capacitor and a microchannel that can reduce the fluctuation of the pulsatile flow generated by a piezoelectric micropump. A parameter model was developed and the dynamic simulation was presented in order to study the dynamic device characteristics. Simulation showed that larger fluidic resistance of the microchannel, higher pump frequency, and larger capacitor radius contributed to better flow stabilization. Experiments were conducted to verify the effectiveness of the stabilizer, and the results showed that the designed microflow stabilizer could ensure stable flow in a piezoelectric pump.