Abstract:In order to isolate the vibration for precision instruments, we present a smart micro-displacement active vibration isolation system that was composed of a piezoelectric ceramic actuator, sensor and controller. Based on the national instruments (NI) data acquisition system and the B&K (Brüel & Kj?r) vibration exciter, we built a detailed experimental platform for the micro-displacement active vibration isolation control system. We developed a fuzzy-proportional integral derivative (Fuzzy-PID) control algorithm using laboratory virtual instrumentation engineering workbench (Lab VIEW) and applied it to the active vibration control system. We completed the control experimental research under sweep, random and sine excitation signals, and were able to obtain a significant displacement reduction of the active vibration isolation system no matter what the excitation signal was. The results verified the validity of the micro-displacement active vibration isolation system and provided an important theoretical foundation for its design and application to precision instruments and Micro-nano equipment.