In order to reduce the impact of high precision positioning platform yaw error and improve the positioning accuracy. This paper studies the yaw error compensation method of the platform based on linear motor drive, air support and guide rails. According to the dynamic characteristics of the positioning platform's yaw errors, a highly frequent responding and non-contact yaw error detection system combined flat feet and micro displacement sensor is designed, a detection algorithm model is established, and an x,y two-dimensional micro-displacement compensation mechanism based on piezoelectric ceramic driver is designed. Using spring mass damper system simplified by flotation rail slider deputy, positioning platform deflection of two degrees of freedom vibration model iss established. The deflection error compensation experiments based on the error compensation system shows that positioning accuracy of precision positioning platform has been greatly improved, the final positioning accuracy of the positioning platform is better than 2μm.