Abstract:This paper proposes a rhombic micro-displacement amplifier (RMDA) for piezoelectric actuator. The amplifier consists of three parts: piezoelectric actuator (PA), flexible hinge and rhombic amplification part. However, the key drive part of RMDA is PA. PA has hysteresis effects, it is mean that the RMDA also has. To ensure the accuracy for amplifiers, the hybrid model which is based on discrete classical Preisach model (CPM) and support vector machine (SVM), is introduced to accounts for hysteresis effects. Finally, the hybrid model and its inversion model of the amplifier are modeled and successfully validated via experimental results. The results demonstrate that hybrid modeling have high accuracy for express the input/output relations of RMDA which have hysteresis effects.