Abstract:In order to solve the problem that the micro-driven deformation of the macro-micro dual-drive linear piezoelectric motor is small, we present a macro-micro dual-drive cymbal-type linear piezoelectric motor, which can realize the ultrasonic drive with the vibration mode under a specific driving frequency, operating voltage and phase difference, and generate the micro-driven deformation by the micro-displacement amplification mechanism. In this paper, the piezoelectric motor takes the cymbal piezoelectric stack as the driving source instead of the piezoelectric stack composed by the piezoelectric ceramics to magnify the axial displacement at the first time, and the flexible hinge structures as the micro-displacement amplification mechanism are designed to enlarge the micro deformation at the second time. Then, the three-dimensional finite element model of the linear piezoelectric motor is built to carry on the static analysis and static optimization by the finite element software to the elastomer, the cymbal piezoelectric stack and the composite vibrator respectively. The results of the finite element simulation show that, after optimization, the stiffness of the elastomer based on the flexible hinge structure is less than that of the cymbal piezoelectric stack, which meets the design requirement. Moreover, the static deformation along axial direction of the cymbal piezoelectric stack after optimization rises by 8.45 times, compared to that of the piezoelectric stack made up by the piezoelectric ceramics. At the same time, the static displacement along the horizontal direction of the mass point on the drive-foot of the motor after optimization constituted by the elastomer with the flexible hinge structures and the cymbal piezoelectric stacks increases by 12.1%, compared to the deformation of the motor before optimization. So it illustrates that the physical design for the motor in this paper is feasible in theory. Research results provide a reference for the physical design and optimization of the motor.