Abstract:To reduce the requirements for machining precision and assembly, a new type of linear motor is presented based on the micro-vibration of piezoelectric stacks. The working mechanism of the motor is analyzed. Then the clamping structure and overall structure of motor is designed. Further, the best size of the flexible structures is obtained using finite element analysis method on the clamping structure. The prototype is manufactured and tested. Then the speed characteristic curve of motor is analyzed. The experimental results on the prototype verify the feasibility of the scheme, by applying voltage signal of peak to peak value 100 V and frequency of 150 Hz, the no-load speed is 1.23 mm/s and the thrust is 1.6 N.This structure makes the motor run smoothly and reduces the requirements for machining precision and assembly.