Abstract:The piezoelectric pump with valve is becoming more and more favored in aerospace, micromechanics and biological medicine due to the advantages of non-magnetic drive, simple structure, small volume and light weight. In order to improve the output performance of Spiral Linear Valve Piezoelectric Pump in a proposed cantilever structure, the optimization relationship between the geometric parameters of the valve and the material parameters of the valve and the output of the pump is discussed. Firstly the geometric parameter relational expression between pump flow output and valve is deduced, and then under the theoretical guidance, the influence of geometric parameters on the pump output is explored through multi-group experiments. It can be found that the output of Piezoelectric Pump can be improved through selecting the proper spiral polar angle and reducing the width and thickness of valve arm. Comparing the selection of material parameters of Spiral Linear Valve, the output of pump maybe improved through selecting the valve materials with lower shear modulus. The experimental results show that, in order to get higher pump output flow, the best condition is that polar angle of valve takes 1.5π, the valve thickness takes 0.1mm,and the flow influenced by the width of crank arm is not obvious unilateral trend. In this case, the material shear modulus of beryllium bronze is smaller than that of spring steel, the output flow of beryllium bronze valve piezoelectric pump is higher than that of spring steel valve piezoelectric pump.