In order to reduce the vibration error of the positioning platform in the X and Y direction and realize the high precision positioning, first, a macro micro positioning system is built, it is driven by the high performance of the linear motor, gas static pressure guide rail support and guidance of the macro micro positioning platform with large stroke system, and the system positioning accuracy is compensated by the micro platform installed in the macro on the platform driven by piezoelectric ceramics. Then the electromechanical coupled vibration model of the positioning system is established, the macro dynamic platform is controlled by the combination of PID control and minimum beat response control, at the same time, adopting the feed forward-PID control to drive the micro platform. Furthermore, the position output signal of capacitive displacement sensor for real-time detection and location system for terminal as the input signal of micro displacement platform are used to achieve closed loop feedback control of positioning system, and ultimately achieve the macro moving system of vibration error of real-time compensation. Experimental results indicate that the micro compensating platform designed has good dynamic characteristics, real time error compensation effect is good for the positioning system. For the vibration range of X and Y is 4 μm and 3.5μm, after compensation is reduced to the range of 1μm. The results show that the vibration error compensation method in this paper can effectively reduce the positioning system to improve the positioning accuracy of the system.