Abstract:The nonlinear characteristics of micro-manipulation stage may occurrs due to the hysteresis of piezoelectric actuator,which has seriously affected the motion precision and repeated positioning accuracy of the stage. In order to solve the problem,a compound control algorithm of feedforward compensation combined with feedback is proposed. The theoretical model reflecting the hysteresis phenomenon is established by combining discrete Preisach model and support vector machine. The inverse model of discrete Preisach is obtained by adopting the iterative search method based on the hysteresis model. The feedforward compensation of the stage is carried out based on the inverse model. In order to correct the deviation without eliminating by feedforward compensation and the error caused by the model’s uncertainty, proportion integration differentiation (PID) control is used to feedback regulation. In order to illustrate the feasibility of the proposed control method,an experimental comparative analysis of the composite control, feedforward control and PID control is carried out. The results show that the proposed method has better control accuracy and fast response.