Abstract:Micro position platform with a long traveling stroke and a high resolution are greatly required in modern manufacturing industry such as optical waveguide packaging. A non-resonant piezoelectric linear motor is designed for a micro position platform. The principle of operation is briefly introduced, and a prototype is fabricated. The experimental equipments include a signal generator, a power amplifier, a digital phosphor oscilloscope and a laser displacement sensor. The experiment results show that the maximum speed of the motor can reach up to 10.36mm/s with 0.3μm resolution, and the theoretical maximum thrust force of the motor is as 8.33N, which satisfies the application requirements of the micro position platform.