The motion commands to feed drives constitute a major source for excitation of the machine tool feed drive vibrations. Firstly, based on the lumped mass model of ball screw feed drive system, a theoretical model between servo motor torque excitation and system response is established. The co-relation between acceleration profile of motion command and the excitation response characteristics of feed drive system is analyzed. The discontinuous curve at the start point and the end point of jerk profiles in the existing motion profiles leads to frequency contents, which may cause the feed drive into vibration. Secondly, a Cosine-like Jerk motion profile is proposed, which eliminate the discontinuous jerk curve and reduce the excitation on the feed drive system. Finally, taking a ball screw feed drive test bench as the research object, the lumped mass model is established and experimentally verified. On this basis, a simulation model to study the excitation characteristics of motion profiles is established, and then the excitation characteristics of motion profiles are compared and analyzed. Simulation result shows that, Cosine-like Jerk motion profiles has the smallest excitation characteristics, the power density of the second order nature frequency of the work table response is only about 1/10000 of the Jerk-limited motion profiles and about 1/100 of the sine Jerk profiles.