压电驱动三自由度柔顺精密定位平台研究
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TP2

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(国家自然科学基金资助项目(51605271,51575329,61773254);广州市属高校科研资助项目(1201610315);广州大学引进人才科研启动资助项目(ZJH3-2001)


3-DOF Compliant Precision Positioning Stage Based on Piezoelectric Actuators
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    摘要:

    设计了一种由压电陶瓷驱动的整体式平面3-PRR柔顺并联定位平台,平台每条支链采用半圆型柔性转动铰链和直角型柔性直线铰链代替传统的转动副和移动副,消除了传统机构的铰链配合间隙和摩擦,通过Ansys软件对两种铰链进行了刚度分析,并在支链的输入端设计了柔性杠杆位移放大机构以提高平台的工作空间。基于“伪刚体模型法”建立了柔顺定位平台的运动学模型,采用Ansys软件对柔顺并联平台进行有限元分析,得到其静力学特性,最后搭建了平台测试实验系统进行了验证实验。通过运动学模型解析结果和有限元仿真结果与实验结果对比,得到在x方向、y方向和转动角Φp的最大误差分别为10.81%,9.66%和9.79%,验证了运动学理论模型建模方法的可行性。

    Abstract:

    In this paper, a novel 3-PRR planar parallel compliant stage driven by piezoelectric actuators is proposed. In order to eliminate the assembly clearance and friction of the traditional joints, the semi-circular flexure hinge and the right-angle flexure hinge are chosen as the flexible rotation joint and flexible prismatic joint in each chain of the stage, respectively, and then the finite element analysis is used to analyze the stiffness of the two types of hinges. In order to achieve larger workspace in a given size, a lever displacement amplification mechanism is planned in each branch. Based on the "Pseudo-rigid Body Model Method", the kinematic model of the compliant positioning stage is established. Then the finite element analysis of the compliant parallel stage is performed using ANSYS software, and its static characteristics are obtained. Finally, the 3-PRR planar parallel compliant stage experimental test system is set to verify the kinematic model. The maximum error results between the theoretical kinematic analysis, the finite element analysis and the experimental tests in x, y,andφp directions are 10.81%, 9.66% and 9.79%, respectively, which validate the correctness of the kinematic model.

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  • 在线发布日期: 2019-02-18
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