Abstract:The non-resonant friction-driven linear piezoelectric motors have the advantages of structural simplicity and good running stability, but they can only obtain micron-level positioning accuracy. In order to achieve the nano-level positioning accuracy, the precise stepping motion of the motor is realized by precisely controlling the positive pressure and relative speed between the motor stator and mover. Firstly, on the basis of studying the principle of stepping motion of the motor, the driving foot with the characteristics of normal vibration frame is is designed for independent decoupling of normal vibration and tangential one at the driving end. Then, the finite element method is employed to optimize the parameters of the stator’s driving foot, and the main structural dimensions of the stator driving foot are determined. Finally, the motor prototype is fabricated and the vibration characteristics of the motor stator and the mechanical characteristics of the motor system are experimentally investigated. The experimental results of the stator’s vibration characteristics show that the motor can make different driving characteristics in the driving phase and the return phase in the range of 1~400Hz. The difference of the moving displacement of the motion in the above two motion phases is the motor step, which results in a smaller displacement resolution. The experimental results of the mechanical output characteristics show that the motor has micro-and nanostepping motion characteristics in the range of 1~400Hz, and the displacement resolution of the motor is up to 11nm in 1~30Hz. In summary, the motor can achieve micro-nano positioning accuracy within 400 Hz and the maximum motor velocity is up to 63.3μm/s.