The internal circuits of macro-micro ultrasonic motor (MMUSM) drive system require multiple independent different amplitudes, high stability and precise power supply. A multiple independent output power with logical link control (LLC) converter and switch integrated voltage regulator is designed. The LLC converter is used to convert alternating current (220 V) to multiple output. The main power is closed-loop controlled toachieve a high-precision regulated output. The other auxiliary output is regulated by a high efficiency MP1584 Buck-regulator. Its drive control system includes a power supply, MMUSM, a macro-micro driver, a grating ruler and a laser scanning vibrometer. The experimental results show that this power supply solves the cross regulation problem existing in the traditional single-stage multi-output power supply. It can provide a stable voltage within ±1%, and the efficiency is ≥80%.It also has a simple circuitand a small size, which is easy to implement in engineering design. In addition, the reliability, the volume and the efficiency of this MMUSM drive system are optimized.