Abstract:An idea that single-electrode can be used as an acceleration sensor is proposed in this paper. The voltage sensitivity of the single-electrode sensor is presented based on the second type piezoelectric equation and the deflection differential equation of the annular plate. The resonant frequency of the sensor is obtained with the finite element method. The experimental platform is set up to calibrate the sensor. Experiment results show that the output of single-electrode can maintain a good linear relationship with acceleration while the pulse width of acceleration exceeds 500μs. However, there is interference besides useful signals. A lowpass digital filter is designed to effectively filter out the noise. The filtered signal still has a good linear relationship with acceleration. The research results expand the function of the ultrasonic motor and promote the application of ultrasonic motor in the shock environment