菱形压电电机在并联精密定位平台中的应用
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TH122

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(国家自然科学基金资助项目(51805465,51405420,51575470);国家重点研发计划资助项目(2017YFC0703202);江苏省高等学校自然科学研究面上资助项目(18KJB460030);江苏省“六大人才高峰”高层次人才资助项目(JXQC-029);江苏高校“青蓝工程”资助项目(苏教师[2016]15号,[2018]12号)


Application of Rhombic Piezoelectric Actuator in Parallel Positioning Platform
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    摘要:

    为了解决传统压电陶瓷驱动器固有的高精度与大行程的矛盾,提出了利用非共振式压电电机的两种不同运动模式来实现精密定位平台的定位高精度与工作大行程的方案。设计了一种新型菱形压电电机,分析其工作原理,给出了定子结构及夹持预紧结构的设计方案。菱形压电电机的实验结果表明,其步进作动模式下定位分辨率为1.0μm,连续运动模式下最大空载速度为0.932 mm/s。在此基础上,利用3台菱形压电电机同步驱动并联精密定位平台,实验结果表明,并联平台平动定位分辨率为1.0μm,转动定位分辨率分别为8.6,11和10μrad。实验重复进行10次,动平台定位分辨率的波动率均低于5%,表明了该并联平台具有良好的同步性与重复性。另一方面,利用菱形压电电机的连续运动模式可实现大行程空间定位,其平动工作行程为3.54 mm,转动工作行程分别为3.92°,4.16°和4.05°。借助于菱形压电电机的不同工作模式实现了并联平台的精密定位和大行程工作空间两个关键指标,为进一步研究精密定位平台的动态性能、控制规律提供了理论价值和实践基础。

    Abstract:

    In order to solve the inherent contradiction of high precision and large working stroke in the traditional piezoelectric ceramic actuator, two motion modes of nonresonant piezoelectric actuator can be used to realize the high precision positioning and large working stroke. A new novel rhombic piezoelectric actuator is developed by designing the stator structure and the clamped pretensioning structure, and the working principle is also analyzed. The experimental results show that the positioning resolution is 1.0μm in the step motion mode, and the maximum motion speed is 0.932 mm/s in the continuous motion mode. On this basis, three rhombic piezoelectric actuators are synchronously applied to drive the parallel precision positioning platform. The translation resolution of the parallel platform is 1.0μm based on the step motion mode, and the rotation resolutions are 8.6, 11 and 10μrad, respectively. The excellent synchronization and repeatability of the parallel platform are also be proved by implementing the experiments for 10 times, and the fluctuation ratio of the repeatability data is less than 5%. In addition, the large working stroke of the translation and rotation are 3.54mm, 3.92°, 4.16° and 4.05°, respectively, in the continues motion mode of the piezoelectric motor. The key performance indicators of precision positioning and large working stroke of the parallel platform are both realized based on the different motion modes of only one piezoelectric motor. All of the above methods have a theoretical and experiment foundation for the further study of the dynamical performance and control law of the precision parallel platform.

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  • 在线发布日期: 2020-08-27
  • 出版日期: 2020-08-30
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