The dynamic Reynolds equations and liquid film energy equations are deduced and solved by finite element method. The thermoshydrodynamic characteristic model of liquid film seal considering the cavitation is established. On this basis， the influence of groove number， groove depth， rotational speed and pressure on the stiffness and damping of liquid film is analyzed： considering the cavitation and thermal viscosity， the interaction between the two orthogonal angular coefficients is weak， and the coupling angular coefficient is smaller than those of the orthogonal angular and the axes； the absolute value of stiffness coefficients increases with the increase of groove number， groove depth， rotational speed and pressure； The absolute value of damping coefficients increase with the increase of rotational speed and pressure， and decrease slightly with the increase of groove number and groove depth. The anti-perturbation ability of the liquid film shares the same rules with the absolute value of stiffness coefficients.