Abstract:This paper proposes an active control mothed based on the state feedback to suppress the vibration of the parallel microgripper finger driven by linear ultrasonic motors, to improve the stability of the microgripper. First, the dynamic model of the disk and the moving finger in microgripper system is established by finite element method, and the state equation is derived. Then, the controllability and stability of the vibration system are analyzed. The state feedback matrix is obtained by pole assignment method, and the vibration feedback control law is designed. The feedback system is simulated and analyzed by Simulink to verify the vibration suppression effect of the active control on the finger. Finally, the experiments of clamping steel ball and camellia pollen cell in micron scale are carried out by using the designed control system. The results indicate that the clamping performance and stability of the microgripper under the active control strategy can meet the requirements of micro-nano positioning accuracy.