Piezoelectric actuation has the outstanding advantages of simple structure， diverse configurations， high force density，high precision， fast response， power off self-locking， no electromagnetic interference，good environmental adaptability， etc. It has an urgent application demand in the fields of ultra-precision machining， semiconductor manufacturing，robots，precision instruments，life sciences， aerospace and weapon equipment， and has become the core technology for high-end equipment to develop towards high-grade. Piezoelectric actuation technology can provide a solid basis for the breakthrough and development of high-end equipment， which has important scientific significance and outstanding practical value. This work starts from the actual demand of high-end equipment development for precision drive technology，systematically illustrates the definition，classification and characteristics of piezoelectric actuation technology， introduces the research status of piezoelectric drive technology in detail，summarizes and analyzes the typical applications of piezoelectric actuation technology，and finally discusses and prospects the piezoelectric actuation technology.