液态金属泡沫柔性压力传感器设计及试验
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TP212;TH393

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国家自然科学基金资助项目(51775364, 51805356, 62101432);山西省科技重大专项资助项目(20181102009);山西省省筹资金资助回国留学人员科研项目(2020?036)


Design and Test of Liquid Metal Foam Flexible Pressure Sensor
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    摘要:

    采用低弹性模量且具有高介电常数的材料作为电容式压力传感器的介电层,是一种提高传感器灵敏度与初始电容信号的理想方法,然而这2个材料特性往往相互冲突。针对这一问题,提出了一种液态金属弹性体泡沫,其具有较低的弹性模量(10.2 kPa)、较强的可压缩性(70%应变)与高介电常数(5.5~20.9)。以该泡沫作为介电层,并设计带有屏蔽层的柔性电极,研制了一种高灵敏度、大初始电容信号的柔性电容式压力传感器。试验结果表明,该传感器灵敏度高达0.36 kPa-1,响应/恢复速度快(<49 ms),迟滞低(8.7%),同时可检测低至4.9 Pa的微小压力,具有良好的稳定性与可靠性。此外,通过驰张筛筛板弯曲挠度变化测试验证了所研发传感器的有效性,与激光位移传感器的测量结果对比表明,该柔性压力传感器可准确检测弛张筛筛板弯曲挠度的变化。

    Abstract:

    Using a material with a low elastic modulus and a high dielectric constant as the dielectric layer of a capacitive pressure sensor is an ideal method to improve the sensitivity of the sensor and the initial capacitance signal. However, two properties of these materials often conflict with each other. To address this problem, a liquid metal elastomer foam is proposed, which has a low elastic modulus (10.2 kPa), strong compressibility (70% strain) and high dielectric constant (5.5~20.9). Using the foam as the dielectric layer and designing a flexible electrode with a shielding layer, a flexible capacitive pressure sensor with high sensitivity and large initial capacitance signal is developed. The test results show that the sensitivity of the sensor is as high as 0.36 kPa-1, the response/recovery speed is fast (<49 ms), and the hysteresis is low (8.7%). At the same time, it can detect tiny pressures as low as 4.9 Pa, and has good stability and reliability. In addition, the effectiveness of the developed sensor is verified through the test of the bending deflection of the sieve plate of the relaxation screen. Compared with the measured value of the laser displacement sensor, experimental results show that the flexible pressure sensor can accurately detect the change of the bending deflection of the sieve plate of the relaxation sieve

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历史
  • 收稿日期:2021-08-31
  • 最后修改日期:2022-02-17
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  • 在线发布日期: 2023-03-09
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